Optimum solution for heating solvents and IPA


  • Solvent heating
  • Etching
  • Isopropyl Alcohol (IPA) heating
  • Wafer cleaning
  • Features
    • Enhanced features include a non-casted structure, versatile flow rates, an expanded wattage range, and high-quality electropolished surfaces resulting in superior cleanliness.
    • Grounded metal construction, multiple element thermocouples, insulated housing, and a hermetically sealed high limit thermal cutoff device (TCO)
    • Can be used in single pass or recirculating applications for safely heating chemistries such as: EKC265, EKC830, EKC270, ST28, ST26, ACT690C, MEK, NMP and IPA
    • Certification: UL 823, UL 499, CSA 22.2, and CE; rated for Class I, Division 2 hazardous locations.
  • Specifications
    • 3,000-36,000 watts
    • 120-600 V, single or three phase
    • Pressure range: Up to 100 PSIG (689 kPa)
    • Temperature range: Up to 180°C (356°F)
    • Fluid Connections: ½-inch (12mm), ¾-inch (19mm), 1-inch (25mm) tube stubs (or custom connections); custom connections available.
    • Electropolished 316L stainless steel, PFA and PTFE wetted surfaces, and a fluid pathway through a patented circular tubing array.
  • Options Available (consult factory)
    • Custom configurations, connections and controller packages available.

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